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Callisto Point of Use Dry Scrubbing Systems

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Jupiter Scientific’s Callisto Dry Scrubbing units offer affordable and efficient abatement for a very wide variety of gases. The destruction and removal efficiency of Callisto Dry Scrubbers is unmatched by any point of use abatement system on the market. In all cases we promise output concentration below threshold limit values. Our Callisto Dry Scrubbers are also versatile because if your process changes you can feel confident that your scrubber will not become obsolete. A simple modification of the gas sensor and software along with use of an appropriate scrubbing cartridge will allow your scrubber to move to a new process.

A Partial List of Processes and Gases that Callisto Dry Scrubbers Abate


PECVD
TEOS
ION IMPLANT
CIGS
Metal Etch
Dry Etch
Hydrides (e.g. Arsine, Phosphine, Diborane, Silane, Hydrogen Selenide)
Halogens (e.g. Chlorine, Fluorine, Bromine)
Acid Gases (e.g. HCl, HF, HBr)
VOC
Aromatics
Mercury
Hydrogen Sulfide
NOX
CO
Ozone


Key Features of Callisto Dry Scrub Units


Low pressure drop
DRE > 99.9%
Integrated flow management
Extremely low utility usage
Ethernet connectivity
Real-time data logging
Callisto Dry Scrub units offer a passive abatement solution that is available even in the event that your facility loses all utilities.

Callisto

Point of Use Dry Scrubber

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